| 摘要 |
PURPOSE:To enable noncontact observation of the potential of an input/output terminal positioned outside a vacuum chamber by applying an electron beam to a measuring terminal and by detecting a secondary electron therefrom. CONSTITUTION:A test board 2 is fitted to an open end of a tubular case body 1, a vacuum chamber 1a is formed by keeping a connecting part airtight by means of a sealing member 3, a semiconductor integrated circuit 6 is set in a socket 5, and each input/output terminal 6a of the circuit 6 is brought into close contact with each of measuring terminals 4 in a plurality. When a driver 8 impresses an input signal SIN on the circuit 6 through the measuring terminal 4, the circuit 6 outputs an output signal SOUT to a load circuit 9 through the measuring terminal 4. An electron beam control element 14 applies an electron beam 10 intermittently to an exposed terminal 4a connected to each measuring terminal 4 on the driver 8 side and the load circuit 9 side and the amount of a secondary electron 10a generated from the terminal 4a is detected by a detector 13. By this method, it is possible to measure the potential of the terminal 4 in a noncontact manner and to restore an input/output waveform in a waveform processing element 15. |
