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发明名称
PATTERN FORMATION
摘要
申请公布号
JPH0215615(A)
申请公布日期
1990.01.19
申请号
JP19880165329
申请日期
1988.07.01
申请人
MITSUBISHI ELECTRIC CORP
发明人
YAMAGUCHI ATSUMI;KAWAI AKIRA;UOTANI SHIGEO
分类号
H01L21/3213;H01L21/027;H05K3/02
主分类号
H01L21/3213
代理机构
代理人
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地址
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