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发明名称
MEASUREMENT OF SINGLE CRYSTAL DIAMETER AND EQUIPMENT THEREFOR
摘要
申请公布号
JPH0214892(A)
申请公布日期
1990.01.18
申请号
JP19880160797
申请日期
1988.06.30
申请人
KAWASAKI STEEL CORP
发明人
NISHIZAKI KATSUMI
分类号
C30B15/26;H01L21/208
主分类号
C30B15/26
代理机构
代理人
主权项
地址
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