| 摘要 |
PURPOSE:To reduce the void between arragements of a strip oscillator by providing a process to manufacture a laminated body, a process to simultaneously execute the baking of a piezoelectric-ceramic and the burning of a void forming material and to manufacture a laminated structure body, a process to manufacture the strip oscillator once and the process to execute a polarization processing and manufacturing a probe. CONSTITUTION:The laminated body to alternately laminate a green sheet 1 of piezoelectric-ceramics 5 and the void forming material is manufactured. Next, the green sheet covered with a void forming material 2 is laminated and press-bonded in the proper number of sheets, and the laminated body is manufactured. By defatting and baking the laminated body, the baking of the piezoelectric-ceramics 5 and the burning of the void forming material 2 are simultaneously executed. Next, the baked laminated body is segmented at the interval of the thickness of the oscillator in parallel to a laminating direction and simultaneously, in the thickness direction of the oscillator, and the strip oscillator is formed at once. Lastly, electrodes are formed on the surface of the individual oscillators arranged in an array, and the polarization processing is executed. Thus, a shape ratio w/t < 0.6 between a thickness(t) and a width(w) of the oscillator in a frequency can be satisfied, and the void in the width direction of the oscillator can be obtained small. |
