OXIDIZING METHOD OF POLYCRYSTALLINE SILICON,申请号JP19880160799-传众专利搜索

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发明名称	OXIDIZING METHOD OF POLYCRYSTALLINE SILICON
摘要
申请公布号	JPH0212821(A)	申请公布日期	1990.01.17
申请号	JP19880160799	申请日期	1988.06.30
申请人	KAWASAKI STEEL CORP	发明人	HAIDA OSAMU
分类号	H01L21/3205;H01L21/316	主分类号	H01L21/3205
代理机构		代理人
主权项
地址

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