Large area microwave plasma apparatus,申请号US19880174659-传众专利搜索

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发明名称	Large area microwave plasma apparatus
摘要
申请公布号	US4893584(A)	申请公布日期	1990.01.16
申请号	US19880174659	申请日期	1988.03.29
申请人	ENERGY CONVERSION DEVICES, INC.	发明人	DOEHLER, JOACHIM;KRISKO, JEFFREY M.
分类号	C23C16/50;C23C16/511;C23F4/00;H01J37/32;H05H1/46	主分类号	C23C16/50
代理机构		代理人
主权项
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