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发明名称
Laser beam scanning method for forming via holes in polymer materials
摘要
申请公布号
US4894115(A)
申请公布日期
1990.01.16
申请号
US19890310149
申请日期
1989.02.14
申请人
GENERAL ELECTRIC COMPANY
发明人
EICHELBERGER, CHARLES W.;WOJNAROWSKI, ROBERT J.;WELLES, II, KENNETH B.
分类号
B23K26/00;B23K26/38;H01L21/302;H01L21/3065;H01L21/311;H01L21/768;H01L23/522;H01L23/538;H01L27/01;H01S3/00;H05K3/00
主分类号
B23K26/00
代理机构
代理人
主权项
地址
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