发明名称 METHOD AND DEVICE FOR INSPECTING FUNCTION OF CRYOPUMP OPERATED BY REFRIGERATOR
摘要 PURPOSE: To check the operation of a cryogenic pump by reading out all kinds of data of the cryogenic pump under various operation conditions and comparing them with objective data. CONSTITUTION: All kinds of data of a cryogenic pump 1 under various operation conditions are read out and are compared with the objective data. Therefore, for example, if there is an output reduction of the refrigerator 3 of the cryogenic pump 1, if there are outer changes, for example, change of air contents, change of air load, change of radial load etc., can be confirmed. While the cryogenic pump 1 is regenerated, in order to reconfirm the function of the pump, the net refrigerating powers of refrigerators 4, 5 are measured.
申请公布号 JPH0211870(A) 申请公布日期 1990.01.16
申请号 JP19890087177 申请日期 1989.04.07
申请人 LEYBOLD AG 发明人 HANSUUURURIHI HEEFUNERU;MANFUREETO KUROTSUTSU;BUIRUHERUMU SHIYUTORATSUSERU
分类号 F04B39/00;F04B37/08 主分类号 F04B39/00
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