| 摘要 |
PURPOSE:To recognize a scribe position accurately by a method wherein chips having one or more types of element structures are provided and an integrated circuit ia composed of a plurality of the chips and a region separating a plurality of the chips from each other is covered with wide conductive elements. CONSTITUTION:A plurality of element regions having an identical element structure are formed on one semiconductor wafer 1 by a so-called master-slice method. A master-slice integrated circuit 6 having an element scale larger than that which can be integrated with a single chip structure is formed by connecting the internal circuit 3a of a chip 2a to the internal circuit 3 of a chip 26 with wirings 5 crossing an inter-chip region 4 with the element region as a foundation. Moreover, as wide wirings 7 which are not connected to the internal circuits 3a and 3b cover the inter-chip region 4, it can be accurately recognized that the integrated circuits are composed of a plurality of the chips in a scribe process and a scribe position can hardly be mistaken. |
