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发明名称
HEAT TREATMENT OF COMPOUND SEMICONDUCTOR ELEMENT CONTAINING ARSENIC
摘要
申请公布号
JPH021930(A)
申请公布日期
1990.01.08
申请号
JP19880143151
申请日期
1988.06.10
申请人
NEC CORP
发明人
OOTSUKA NAMIKI
分类号
H01L21/265;G01J5/00;H01L21/324
主分类号
H01L21/265
代理机构
代理人
主权项
地址
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