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经营范围
发明名称
COATING METHOD
摘要
申请公布号
JPH021862(A)
申请公布日期
1990.01.08
申请号
JP19880145097
申请日期
1988.06.13
申请人
TOKYO ELECTRON LTD
发明人
TOSHIMA TAKAYUKI;ORII TAKEHIKO
分类号
G03F7/16;B05C5/00;B05C11/08;B05D1/02;H01L21/027;H01L21/30
主分类号
G03F7/16
代理机构
代理人
主权项
地址
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