发明名称 EPROM cell utilising a trench insulation and its method of manufacture
摘要 The present invention proposes a highly reliable EPROM cell utilising a trench insulation and its method of manufacture. This new EPROM cell includes a control gate 11 constituted from a strongly doped n-type silicon, and a floating gate 13 constituted from a single poly-I layer. <IMAGE>
申请公布号 FR2633777(A1) 申请公布日期 1990.01.05
申请号 FR19890008469 申请日期 1989.06.26
申请人 GOLDSTAR SEMICONDUCTOR LTD 发明人 SANGSOO LEE
分类号 H01L21/8247;H01L21/28;H01L21/336;H01L21/76;H01L27/10;H01L27/115;H01L29/06;H01L29/788;H01L29/792 主分类号 H01L21/8247
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