METHOD OF FORMING SEMICONDUCTOR THIN FILM,申请号EP19890302045-传众专利搜索

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发明名称	METHOD OF FORMING SEMICONDUCTOR THIN FILM
摘要
申请公布号	EP0331467(A3)	申请公布日期	1990.01.03
申请号	EP19890302045	申请日期	1989.03.01
申请人	FUJITSU LIMITED	发明人	ESHITA, TAKASHI;MIENO, FUMITAKE SAGINUMADAI SKY MANSION 105;FURUMURA, YUJI;WATANABE, TAKUYA
分类号	H01L21/20;H01L21/205;(IPC1-7):H01L21/20	主分类号	H01L21/20
代理机构		代理人
主权项
地址

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