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发明名称
SPECTROMETER-DETECTOR ARRANGEMENT FOR QUANTITATIVE POTENTIAL MEASUREMENTS
摘要
申请公布号
EP0262365(A3)
申请公布日期
1989.12.27
申请号
EP19870111899
申请日期
1987.08.17
申请人
SIEMENS AKTIENGESELLSCHAFT
发明人
FEUERBAUM, HANS-PETER, DR., DIPL.-PHYS.;PAPP, ALFRED, DR., DIPL.-ING.;OTTO, JOHANN, DIPL.-ING. FH
分类号
H01L21/66;G01N23/22;G01R29/24;G01R31/302;G01T1/36;H01J37/244;H01J37/28;(IPC1-7):G01R29/24;G01R31/28
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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