| 摘要 |
PURPOSE:To obtain a piezoelectric material rich in flexibility with large piezoelectric effect, by changing into an electret the dispersed substance wherein ferroelectric corpuscles with surfaces coated with plasma polymer films are dispersed into a polymer substance. CONSTITUTION:The material is formed by changing into an electret the dispersed substance wherein ferrodielectric corpuscles with surfaces coated with plasma polymer films are dispersed into a polymer substance so that the rate to the entire body is 30-90vol%. E.g. by using a plasma polymerization vessel, surfaces of PZT corpuscles ''Netec 21'' ferrodielectric corpuscles are coated with plasma polymer films, and accordingly coated ferrodielectric corpuscles are manufactured. The coated corpuscle which is obtained and vinylidene poly fluoride ''Kynar 820'' are kneaded at the rate of 60:40 in volume, then the dispersed substance is molded by a hot press, and accordingly a film is obtained. The piezoelectric material is obtained by evaporating Au on the both surfaces of the film into an electrode and finally impressing a DC field resulting in the formation of an electret. |
