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发明名称
Evaporant source
摘要
申请公布号
US3271562(A)
申请公布日期
1966.09.06
申请号
US19640379307
申请日期
1964.06.30
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
JR. GILBERT C. ROBERTS,;VIA GIORGIO G.
分类号
C23C14/16;C23C14/24;C23C14/26
主分类号
C23C14/16
代理机构
代理人
主权项
地址
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