发明名称 METHOD FOR MANUFACTURING ORGANIC SEMICONDUCTOR THIN FILM AND SEMICONDUCTOR DEVICE COMPRISING THE THIN FILM
摘要 A method for manufacturing an organic semiconductor thin film (24) having an improved characteristic as a semiconductor is provided. A phthalocyanine compound having amino groups is mixed with stearic acid to form a bonded substance capable of being dissolved in an organic solvent. Then, an organic solution is made by dissolving this bonded substance in the organic solvent. By developing this organic solution on a water (20) surface, the thin layer (23) of this bonded substance is formed on the water (20) surface. Thereafter, this thin layer is moved onto a substrate (30) and accumulated to be deposited on the substrate (30). Next, the stearic acid is volatilized and removed from the above described thin film (23) deposited on the substrate (30) by baking the whole substrate. The thus structured organic semiconductor thin film (24) is used as a semiconductor material such as a photoelectric transfer device, a gas sensor, a transistor and the like.
申请公布号 GB8924601(D0) 申请公布日期 1989.12.20
申请号 GB19890024601 申请日期 1989.11.01
申请人 MITSUBISHI DENKI KABUSHIKI KAISHA 发明人
分类号 B05D1/20;C09K3/00;C30B7/00;C30B7/04;C30B29/54;G01J1/42;G01N27/12;G01N27/30;H01L29/78;H01L29/786;H01L29/86;H01L49/02;H01L51/00;H01L51/05;H01L51/30;H01L51/40;H01L51/42;H03K17/56 主分类号 B05D1/20
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