| 摘要 |
PURPOSE:To obtain a sample support bed with mechanical strength, workability, and easy and safe handling by using hBN(hexagonal boron nitride) sintered bodies for the main body of the support bed. CONSTITUTION:A carbon spray is sprayed as a smoothing agent on surfaces of two hBN sintered bodies 11 and 13 to constitute a sample support bed 6. When an electron beam is illuminated on a sample for analysis, characteristic x-rays generated by the sample support bed 6 are not detected by a detector, the electrification on the sample surface can be prevented. The hBN sintered body has mechanical strength higher than that of graphite, it is cheaper than Be and nontoxic, its workability is good like graphite. The sample support bed with sufficient mechanical strength, workability, and easy and safe handling is obtained. |
