STAMPER FOR MOLDING RESIN OR GLASS SUBSTRATE

摘要

PURPOSE:To improve the accuracy and strength of a stamper by forming a vacuum-deposited thin film on a substrate through a pattern formed on the substrate by photoetching as a mask, removing the remaining resist and using the thin film as the stamping face. CONSTITUTION:A photoresist film 2 is formed on a substrate 1 of a metal or dielectric. This stamper substrate 26 having the formed photoresist film 2 is irradiated with laser light 21 and a photoresist pattern is formed by development. A thin film 5 is them formed on the surface of the substrate through the pattern as a mask by vacuum deposition, sputtering or other method and the remaining photoresist 2 is removed to obtain a substrate 6 having a desired molding pattern.