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发明名称
Method and apparatus for producing semiconductor material
摘要
申请公布号
US3310426(A)
申请公布日期
1967.03.21
申请号
US19630313298
申请日期
1963.10.02
申请人
SIEMENS & HALSKE AKTIENGESELLSCHAFT
发明人
HENKER HEINZ;RUMMEL THEODOR
分类号
C30B23/00
主分类号
C30B23/00
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代理人
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