DEVICE FOR COATS' VACUUM APPLICATION BY MEANS OF MAGNETRON SPRAYING

摘要

Device for vacuum coating deposition by magnetron sputtering has a magnetron located in a chamber, a process gas supply system, a coolant supply system, a current supply system and a drive system. - The magnetron system is rigidly connected to an earthed screening tube, an insulating tube, a current supply tube and an inner tube, all arranged successively within one another. The current supply tube and the inner tube form the cooling liq. supply system, while a process gas supply tube and an electrical lead to the anode are arranged in the space between the screening tube and the insulating tube. The screening tube and the current supply tube are electrically insulated from one another by insulating bodies and are sealed vacuum-tight by rubber sealing rings. The screening tube passes through a lock device into the vacuum chamber and forms the connection between the magnetron and the drive.