| 摘要 |
<p>A sensor for, e.g., the measurement of gas concentration, comprising a sensor element (8,10); a heating element (11) arranged in conjunction with the sensor, with which the sensor element can be brought to a temperature above the ambient gas atmosphere temperature; and an electronics circuitry section (18), with which the desired electronical properties of the sensor element (8,10) can be measured and the heating element (11) of the sensor (8,10) can be controlled. The sensor element (8,10) and the electronics circuitry (18) are on the same planar substrate which has openings around the sensor element area (8,10) to the immediate vicinity of the area so that the openings (5,13,17) extend through the substrate (1,7), whereby the sensor area (8,10) is connected to the surrounding part of the substrate and, thence, to the electronics circuitry section (18), only along thin isthmuses (14) remaining between the openings.</p> |
