METHOD AND APPARATUS FOR SURFACE DIAGNOSTICS,申请号EP19850900261-传众专利搜索

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发明名称	METHOD AND APPARATUS FOR SURFACE DIAGNOSTICS
摘要
申请公布号	EP0167561(B1)	申请公布日期	1989.12.06
申请号	EP19850900261	申请日期	1984.09.20
申请人	SRI INTERNATIONAL	发明人	BECKER, CHRISTOPHER, H.;GILLEN, KEITH, T.;BUTTRILL, SIDNEY, E., JR.
分类号	G01N23/225;H01J37/252;H01J49/40;H01L21/00	主分类号	G01N23/225
代理机构		代理人
主权项
地址

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