| 摘要 |
PURPOSE:To obtain a large-output excimer laser beam by a method wherein a plurality of sets of existing excimer laser oscillators are used and they are combined appropriately. CONSTITUTION:N-laser oscillators 1 are used; laser beams 2 generated by them are composed, and a large-output complex converged beam is formed. During this process, a beam characteristic can be changed in the following manner: to obtain a large output of a laser while an energy pulse is made a plurality of times, e.g., n times, as high as the pulse energy P by controlling the generation timing of the laser pulses 3 from the individual oscillators 1 and by making the generation time of the pulses 3 having an identical frequency (f) identical; alternatively, to obtain the large output of the laser by expanding a pulse width to a plurality of times, e.g., n times, while the generation timing of the pulses from the two or more sets of the oscillators 1 is delayed one after another by a pulse width W; alternatively, to obtain the large output by making the repetition number of the pulses of a composed beam a plurality of times, e.g., two times, as many as one in the case of one laser oscillator. |
