| 摘要 |
PURPOSE: To obtain a superior confocal scanning microscope with high contrast and high resolution by specifying the mobile diameter and directional angle of a hole in the radial direction, which is provided in the circular pattern part of a scanning disk. CONSTITUTION: The mobile radius Rn of the hole in the radial direction, which is arranged in the scanning disk circular pattern of the confocal tandem scanning microscope is arranged along a sereis of adjacent arch-shapes which are stipulated by formula I. In the formula, Rn is the mobile radius of a point (n) in the radial direction, Rn-1 is the mobile radius of a point n-1 (that is, the preceding point) and K is a constant. The directional angle T of the mobile radius is defined as the angle indicated by formula II. In the formula, T is the printing angle of the mobile radius and L is the distance between the endpoints of the mobile radius in the radius direction. This kind of circular pattern is attained by performing fine working in a silicon wafer, and 20μm is required as the hole dimension.
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