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发明名称
ION IMPLANTER
摘要
申请公布号
JPH01302648(A)
申请公布日期
1989.12.06
申请号
JP19880133065
申请日期
1988.05.30
申请人
MITSUBISHI ELECTRIC CORP
发明人
MATSUDA SHINTARO
分类号
H01J37/05;G01N27/62;H01J37/18;H01J37/317;H01L21/265
主分类号
H01J37/05
代理机构
代理人
主权项
地址
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