| 摘要 |
PURPOSE:To obtain the title uniform ceramic improved in wear resistance, by introducing into a reaction furnace a mixed gas comprising TiCl4 and Si2Cl6, Si-contg. gas, Ti-contg. gas, H2 and carbon halide gas or lower hydrocarbon gas. CONSTITUTION:A liquid mixture comprising 10-90wt.% of liquid TiCl4 and 90-10wt.% of liquid Si2Cl6 is kept at 0-150 deg.C, and an inert gas is introduced into this liquid mixture to generate a mixed gas. Thence, the mixed gas, Si- contg. gas, Ti-contg. gas, H2 and carbon halide gas (e.g. CCl4) or lower hydrocarbon gas (e.g. methane) is introduced into a reaction furnace kept at 1-175torr, thus forming the objective ceramic of two-phase mixed texture made up of 0.1-50vol% of crystalline SiC and crystalline TiC on the surface of a substrate at 1,000-1,700 deg.C placed in the furnace. |
