| 摘要 |
PURPOSE:To obtain magnetic films of a simple structure comprising a simple material by alternately laminating a plurality each of magnetic film layers substantially comprising a single element and non-magnetic layers on a substrate. CONSTITUTION:The basic constitution of magnetic multilayered films comprises the following parts: Fe layers 1, non-magnetic layers 2 and a substrate 3 comprising Al-Ti-C ceramics, Zn ferrite and the like. The Fe layers 1 and the non- magnetic layers 2 are altermately formed on the substrate 3 by, e.g., a sputtering method. The magnetic characteristics are required as a magnetic film for a thin-film magnetic head oriented toward high line recording density and high track density. The magnetic characteristics sufficiently satisfy all the characteristics such as magnetstriction in the vicinity of zero, low coercive force, high permeability, high saturation magnetic flux density and a magnetic domain controllability. In this way, the material and the structure are simplified, and the high-performance thin-film magnetic head can be formed at high yied rate. |
