| 摘要 |
PURPOSE:To obtain a vacuum processor which can enhance thermal conductivity between a sample and an electrostatic chuck electrode for electrostatically attracting the sample and accurately control the temperature of the sample through a sample base by supplying gas through gas dispersing groove between both and diffusing it in a thin film state between both. CONSTITUTION:A vacuum vessel 1 is controlled therein to a predetermined pressure on the basis of the indication of a pressure gauge 14, and medium of predetermined temperature is supplied to the medium passage 3a of a sample base 3 to control the temperature of the base 3. Small amount of inert gas such as nitrogen gas is supplied by a gas pipe 15 to a gas dispersing groove 20 formed on the upper face of a first insulating layer 4b under the control of a gas flowrate control valve 17. This gas is diffused in a small gap between the first insulating layer 3b of an electrostatic chuck electrode 4 and a sample A in a thin film state. Since thermal conductivity between the sample A and the electrode 4 is remarkably enhanced by the presence of the gas of the thin film state, the temperature of the sample A preferably follows up the temperature of the base 3. |
