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发明名称
MANUFACTURE OF HEMT
摘要
申请公布号
JPH01296672(A)
申请公布日期
1989.11.30
申请号
JP19880125902
申请日期
1988.05.25
申请人
AGENCY OF IND SCIENCE & TECHNOL
发明人
OGASAWARA KAZUTO
分类号
H01L29/205;H01L21/203;H01L21/338;H01L29/778;H01L29/80;H01L29/812
主分类号
H01L29/205
代理机构
代理人
主权项
地址
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