摘要 |
A multilayer amorphous soft magnetic thin film alloy has the advantages of high permeability and high saturation magnetic flux density in high frequency, and is manufactured by heat treatment of the amorphous soft magnetic multilayer thin film of SiO2 and the alloy of the composition of formula Co80 TixNb20-x (0<=X<=20), formed by sputter decomposition, at 300≦̸C for 30 minutes in the atmosphere of N2 or Ar by applying static magnetic field of 200-300 Oe.
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