| 摘要 |
<p>A method and apparatus for purifying hydrofluoric acid, comprising the steps of filtering the hydrofluoric acid to remove particulates (30), passing the filtered acid through a cation exchange material (14) and an anion exchange material (20) to remove ions therefrom, periodically monitoring (42) the acid that has passed through the cation exchange material for a level of cationic impurity representative of actual or impending ionic breakthrough in the cation exchange material, periodically monitoring (44, 46) the acid that has passed through the anion exchange material for a level of impurity representative of ionic breakthrough in the anion exchange material, interrupting the flow of acid at or prior to breakthrough and regenerating the anionic or cationic exchange material.</p> |
