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发明名称
VAPOR GROWTH UNIT
摘要
申请公布号
JPH01294598(A)
申请公布日期
1989.11.28
申请号
JP19880123960
申请日期
1988.05.23
申请人
SUMITOMO ELECTRIC IND LTD;NISSIN ELECTRIC CO LTD
发明人
KAMON KOUICHI
分类号
C30B25/14;H01L21/205
主分类号
C30B25/14
代理机构
代理人
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