发明名称 ILLUMINATOR
摘要 PURPOSE:To reduce coherency and to form an incoherent light source by the simple configuration by providing a reflecting member possessing a lateral surface capable of inner reflection and a means converting incident luminous fluxes from the light source into luminous fluxes crossing at a desired angle around a prescribed point. CONSTITUTION:Since the luminous flux converting means varies the angle of the luminous fluxes made incident on the reflecting member 9 possessing the lateral side capable of inner reflection, many light source images are formed on the incident side due to the reflection on each reflecting plane of the reflecting member 9. Optical paths from those light source images to an object face vary with the length of reflecting optical paths due to the inner reflection. As a result, coherence as the whole of the plural light source images can be reduced. If the luminous flux converting means is configured to a scanning means varying the angle of the luminous flux made incident on the reflecting member 9, the coherence can be further reduced by averaging in terms of time, and in addition, a substantial incoherent light source can be formed.
申请公布号 JPH01295215(A) 申请公布日期 1989.11.28
申请号 JP19890087787 申请日期 1989.04.06
申请人 NIKON CORP 发明人 SHIBUYA MASATO
分类号 G02B26/10;G02B17/00;G02B27/00;G03B27/32;G03B27/54;G03F7/20;H01L21/027 主分类号 G02B26/10
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