| 摘要 |
PURPOSE:To realize a gas laser apparatus having an advantage of an axial flow type and a perpendicularly crossed type by a method wherein a discharge tube having a stagnation part is used and the conductance of a discharge part is made smaller than the conductance of the stagnation part. CONSTITUTION:Stagnation parts 16, 17 are formed on both sides of a discharge part 15; the conductance of a discharge part is made smaller than the stagnation parts 16, 17. That is to say, the outside of a discharge tube is constituted to be of an axial flow type, and only a gas flow inside the discharge tube is made identical to that of a perpendicularly crossed type. By this setup, a cross-sectional area of the gas flow of the discharge part is increased in a direction perpendicular to an optical axis of a resonator; accordingly, a loss of a gas pressure can be lowered; in addition, since the gas stagnation time can be shortened, a cooling effect of a gas can be enhanced. In addition, the gas flow at the outside of the discharge tube flows inside a vacuum pipe in the same manner as a conventional laser of the axial flow type; accordingly, an advantage of the laser of the axial flow type is obtained. |
