SINGLE ELECTRODE, MULTIPLE FREQUENCY PLASMA APPARATUS,申请号EP19840114632-传众专利搜索

首页产品黄页商标征信

会员服务注册登录

法人/股东/高管

发明名称	SINGLE ELECTRODE, MULTIPLE FREQUENCY PLASMA APPARATUS
摘要
申请公布号	EP0149089(B1)	申请公布日期	1989.11.23
申请号	EP19840114632	申请日期	1984.12.01
申请人	TEGAL CORPORATION	发明人	CELESTINO, SALVATORE A.;GORIN, GEORGES J.;HILLIKER, STEPHEN E.;POWELL, GARY B.
分类号	H01L21/205;H01J37/32;H01L21/302;H01L21/3065	主分类号	H01L21/205
代理机构		代理人
主权项
地址

您可能感兴趣的专利

Orthogonal frequency division multiplexing (OFDM) interleaving

TRANSMITTER WARM-UP USING DUMMY FRAME GENERATION

Network Gateway Selection at Multipath Communication

COMMUNICATION SYSTEM, TERMINAL, AND BASE STATION

METHOD AND APPARATUS FOR REPORTING LOCATION INFORMATION

RADIO BASE STATION AND COMMUNICATION CONTROL METHOD

METHOD AND APPARATUS FOR TRANSMITTING AND RECEIVING CHANNEL STATUS INFORMATION (CSI) FOR SUPPORTING 256QAM IN WIRELESS ACCESS SYSTEM

APPARATUS AND METHOD FOR ACCELERATING CONNECTION ESTABLISHMENT IN A MOBILE COMMUNICATION

METHOD AND APPARATUS FOR CONTROL CHANNEL CONFIGURATION IN A HETEROGENEOUS NETWORK ARCHITECTURE

DAS INTEGRATED DIGITAL OFF-AIR REPEATER

SYSTEM AND METHOD FOR IMPROVED COMMUNICATION ON A WIRELESS NETWORK

INCREASED POWER SAVINGS THROUGH COLLABRATIVE SEARCH

METHOD FOR TRANSMITTING CHANNEL STATE INFORMATION, USER EQUIPMENT, AND BASE STATION

WAN-WLAN CELL SELECTION IN UES

Apparatus, System, and Method for Enhanced Reporting and Measurement of Performance Data

Wireless transmission rate adjustment method

Method, System and Program Product for Detecting Wireless Interferers

RELAY ATTACK PREVENTION

SYSTEM AND METHOD FOR CONSERVING POWER IN LINK AGGREGATION GROUPS

MULTIPATH COMMUNICATION IN A NETWORK