| 摘要 |
PURPOSE:To obtain a visual inspecting device of a semiconductor device of a low cost of a lens barrel, a camera, etc., by providing a position detecting means for detecting a moving position of an inspection object on a carrying means. CONSTITUTION:An encoder 4a detects an axial rotation of a motor 3a, and transfers a rotating signal corresponding to a moving position of an IC 1a to a microcomputer 9a through a rotational position detecting part 5a. The microcomputer 9a recognizes a position of the IC 1a on a belt, based on this signal, outputs a light emitting instruction to a stroboscopic light emission lighting equipment 6a, an image of half of the IC 1a is brought to image pickup to a camera 7a by a first light emission, and subsequently, an image of the IC 1a of the remaining half is brought to image pickup to the camera 7a by a second light emission, and they are converted to video signals, respectively and written in image memories 8a, 8b. In such a way, lens barrel for bringing an inspection object to split image pickup becomes unnecessary, only one set of image pickup means is used, and an inexpensive visual inspecting device is obtained. |
