| 摘要 |
PURPOSE:To improve positioning accuracy by providing the X direction and the Y direction driving parts as a plane by changing a position, respectively against an X - Y stage which is brought to two-dimensional driving and bringing directly the X - Y stage to two-dimensional driving. CONSTITUTION:On a stage base 1, an X axis guide rail 2 is provided, and to the rail 2, an X stage 3 is attached through an X axis linear guide 10, and the stage 3 executes a linear operation in the X axis direction. Also, to the stage 3, an X - Y stage 4 is attached through a Y axis linear guide axis 11, and the stage 4 executes a linear operation in the Y axis direction against the stage 3. Moreover, linear DC motors 8, 9 are constituted of a 1-phase coil 22 which has been attached to the stage 4, a linear motor yoke which has been attached onto the base 1, and a permanent magnet 21. By these motors 8, 9, the stage 4 can be brought to two-dimensional movement on the stage 1 by a plane bearing 12. Also, as for the stage 4, X and Y direction positions are detected by X direction and Y direction detectors 6, 7. |
