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发明名称
SPUTTERING DEVICE FOR FILM FORMATION
摘要
申请公布号
JPH01290769(A)
申请公布日期
1989.11.22
申请号
JP19880120468
申请日期
1988.05.19
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
INOUE ISAMU;YOSHIOKA KAZUMI;KODERA KOICHI
分类号
C23C14/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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