发明名称 |
Process for manufacturing a REFET or a CHEMFET, and the manufactured REFET or CHEMFET |
摘要 |
The invention relates to a process for manufacturing a REFET and/or CHEMFET, comprising: (a) covalent bonding of a hydrophilic polymer layer to an isolator layer applied to a semiconductor material; (b) the absorption of water or a watery solution into said hydrophilic polymer layer; and (c) the binding of a hydrophobic polymer layer to the water holding hydrophilic polymer layer. It is advantageous that this water holding hydrophilic polymer layer also contains an electrolyte and/or a buffer. Preferably an ion to be measured with the CHEMFET also forms part of the electrolyte.
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申请公布号 |
US4882292(A) |
申请公布日期 |
1989.11.21 |
申请号 |
US19870093014 |
申请日期 |
1987.09.04 |
申请人 |
STICHTING CENTRUM VOOR MICRO-ELEKTRONICS TWENTE |
发明人 |
SUDHOELTER, ERNST J.;SKOWRONSKA-PTASINSKA, MARIA D.;VAN DER WAL, PETER D.;VAN DEN BERG, ALBERT;REINHOUDT, DAVID N. |
分类号 |
G01N27/00;G01N27/30;G01N27/414;H01L29/78 |
主分类号 |
G01N27/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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