| 摘要 |
PURPOSE:To attain an improvement of maintenance and cleanability by attaching a reinforcing material to an external walls of a charging room, a vacuum processing room, and a taking-out room so as to get rid of a rise from the bottom plane of the inside of an apparatus. CONSTITUTION:A vacuum processing apparatus is composed of a charging room 1, a vacuum processing room, and a taking-out room which are placed in the vertical direction, resp. A reinforcing material 10 is attached to the external walls of each room so as to get rid of a rise from the bottom plane of the inside of the apparatus. As a result, maintenance and cleanability of the apparatus can be improved and elevated remarkably. |
