| 摘要 |
PURPOSE:To prevent sticking of an oxide to an anode electrode and to perform stabilize long hour discharge by arranging auxiliary electrodes coated with the electric near an anode electrode while connecting the anode electrode and the auxiliary electrodes to an AC power supply. CONSTITUTION:Auxiliary electrodes 7 are arranged being lined up near an anode electrode 3 while their surfaces are coated with the dielectric 8. The electrode 3 and the electrodes 7 are connected to an AC power supply 9. When AC voltage is impressed, AC discharge is generated between the electrode 3 and the electrodes 7 so that plasma 10 is generated. When DC voltage is impressed between a cathode electrode 2 and the electrode 3 by a DC power supply 5, plasma 10 prevents an oxide from sticking to the electrode 3 even when the insulating oxide is generated due to sputtering. Thereby, stable and long hour discharge is performed. |
