发明名称 PRODUCTION OF CARBON HAVING HIGH DENSITY AND HIGH STRENGTH, AND CARBON JIG FOR SEMICONDUCTOR
摘要 PURPOSE:To obtain a carbon material having improved content of carbonized component and bulk density of a covering layer as well as improved tightness of adhesion of the covering layer by energizing electric current through a carbon base material impregnated with an org. compd. such as alcohol, pitch in an electrolyte soln., and carbonizing the org. compd. after polymerizing it. CONSTITUTION:One of org. compds. among alcohols such as furfuryl alcohol, hydrocarbons such as benzene, glycols, sugars, pitch, or a mixture thereof is impregnated into voids such as pores, of a carbon material 1 or into spaces 3 thereof, and adhered to the external surface thereof. Then, the base material 1 is dipped in a soln. 2 of an electrolyte contg. a supporting electrolyte, and an electric current is energized through the soln. from an electrode comprising the base material 1. Thus, the org. compd. is polymerized. A thermally set covering layer 5a, 5b is formed by heating and hardening the base material 1 and completing the polymn., and the covering layer is simultaneously dehydrated and gases contained in the layer are expelled by calcining the base material and carbonizing the polymerized product.
申请公布号 JPH01282110(A) 申请公布日期 1989.11.14
申请号 JP19880109114 申请日期 1988.05.06
申请人 TOSHIBA CERAMICS CO LTD 发明人 YAMAZAKI HIROSHI;ITO NORIAKI
分类号 C01B31/02;C04B35/52 主分类号 C01B31/02
代理机构 代理人
主权项
地址