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发明名称
METHOD FOR SPUTTERING THIN FILM
摘要
申请公布号
JPH01275755(A)
申请公布日期
1989.11.06
申请号
JP19880103944
申请日期
1988.04.28
申请人
HITACHI LTD
发明人
NISHIOKA KOICHI;NARUSHIGE SHINJI;IMAGAWA TAKAO;SANO MASAAKI;MITSUOKA KATSUYA;YAMAZAKI HIDEKI;KOBAYASHI TETSUO;YOSHIDA TOSHIHIRO
分类号
C23C14/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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