发明名称 PROCESS FOR PRODUCING THIN FILM OF METAL SULFIDE
摘要 <p>A process for producing a uniform, dense, thin film of a metal sulfide having excellent electric properties which comprises spraying an organic compound containing at least one metal-sulfur bond in its structure independently or in a state of being dissolved in a solvent as fine powdery mist over a heated base plate.</p>
申请公布号 WO1989010326(P1) 申请公布日期 1989.11.02
申请号 JP1989000419 申请日期 1989.04.19
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