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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH01274489(A)
申请公布日期
1989.11.02
申请号
JP19880107107
申请日期
1988.04.26
申请人
SUMITOMO ELECTRIC IND LTD
发明人
MAEDA MASAHIRO
分类号
H01L21/205;H01S5/00
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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