| 摘要 |
PURPOSE:To prevent the lowering of the film thickness of a resist caused by flowing a coating solution into a through hole by specifying the thixotropy and the viscosity of the composition, respectively. CONSTITUTION:The title composition is specified a value which divides the viscosity in a shear rate of 2sec<-1> into the viscosity in the shear rate of 70sec<-1> at 25 deg.C to >=1.2 and also is specified the viscosity to 50-100cps in the shear rate of 70sec<-1>. The shear rate and the viscosity can be measured by a E type viscometer. And the composition is composed of the composition contg. a (meth) acrylic type polymer and monomer, a photopolymerization initiator and an inorg. fine particle, etc. |
