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发明名称
PROCESS AND EQUIPMENT FOR MICRO-PATTERN FORMING ON
摘要
申请公布号
AU3323189(A)
申请公布日期
1989.10.26
申请号
AU19890033231
申请日期
1989.04.20
申请人
KAWASAKI STEEL CORPORATION
发明人
TAKAAKI IGUCHI;TAKANORI TAMARI;TAKAAKI HIRA;KUNIO ISOBE;IKUO YARITA;HIDEO ABE
分类号
B21B27/02;B21H8/02;G03F7/24;G03F7/26
主分类号
B21B27/02
代理机构
代理人
主权项
地址
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