METHOD AND DEVICE FOR DETECTING END OF PLASMA ETCHING,申请号JP19880093351-传众专利搜索

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发明名称	METHOD AND DEVICE FOR DETECTING END OF PLASMA ETCHING
摘要
申请公布号	JPH01268887(A)	申请公布日期	1989.10.26
申请号	JP19880093351	申请日期	1988.04.18
申请人	FUJITSU LTD	发明人	IIZUKA KATSUHIKO
分类号	C23F4/00;H01L21/302;H01L21/3065;H05K3/08	主分类号	C23F4/00
代理机构		代理人
主权项
地址

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