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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH01268154(A)
申请公布日期
1989.10.25
申请号
JP19880097950
申请日期
1988.04.20
申请人
FUJI XEROX CO LTD
发明人
KOJIMA HITOSHI;IWAMORI TOSHIMICHI;YAMASHITA TAKAMARO;SAKATA YASUSHI;TANIDA YUJI
分类号
H01L21/768;H01L21/31
主分类号
H01L21/768
代理机构
代理人
主权项
地址
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